Buch

---

Übersicht

---

Verlag	:	Dr. Hut
Buchreihe	:	Mikrosystemtechnik
Sprache	:	Englisch
Erschienen	:	04. 11. 2022
Seiten	:	203
Einband	:	Kartoniert
Höhe	:	210 mm
Breite	:	148 mm
Gewicht	:	313 g
ISBN	:	9783843951579
Sprache	:	Englisch

---

Produktinformation

---

This dissertation discusses the development and simulation of novel capacitive micromachined ultrasonic transducers (CMUTs) for airborne gesture control and distance sensing tasks. The CMUTs are fabricated in a dual-backplate (DBP) electromechanical system (MEMS) technology and consist of a few hundred nanometer thin membrane placed between two highly perforated counter-electrodes. Fabricated CMUT modules comprising the MEMS, an application specific integrated circuit (ASIC) and a package are in detail characterized and theoretically investigated via a lumped element-based system-level simulation model. Integrating the highly miniaturized, low-cost and low-driving-voltage DBP CMUTs into phased-array based imaging systems proves their applicability to gesture control tasks in mobile communication devices.

Deine Buchhandlung

---