Buch

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Übersicht

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Verlag	:	Springer International Publishing
Buchreihe	:	Microsystems and Nanosystems
Sprache	:	Englisch
Erschienen	:	12. 07. 2018
Seiten	:	424
Einband	:	Kartoniert
Höhe	:	235 mm
Breite	:	155 mm
Gewicht	:	664 g
ISBN	:	9783319804057
Sprache	:	Englisch

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Autorinformation

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Harmeet "Mitu" Bhugra lead the development of the world's first PiezoElectric MEMS timing and sensor products at IDT. He holds 22 US patents and has published multiple technical papers and given multiple talks on MEMS technology.Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.

Inhaltsverzeichnis

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AIN Thin Film Processing and Basic Properties.- Lead Zirconate Titanate (PZT) for M/NEMS.- Gallium Nitride for M/NEMS.- Lithium Niobate for M/NEMS Resonators.- Quality Factor and Coupling in Piezoelectric MEMS Resonators.- Flexural Piezoelectric Resonators.- Laterally Vibrating Piezoelectric MEMS Resonators.- BAW Piezoelectric Resonators.- Shear Piezoelectric MEMS Resonators.- Temperature Compensation of Piezo-MEMS Resonators.- Computational Modeling Challenges.- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators.- Reliability and Quality Assessment (Stability and Packages).- Large Volume Testing and Calibration.- High Frequency Oscillators for Mobile Devices.- BAW Filters and Duplexers for Mobile Communication. 

Deine Buchhandlung

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