Buch

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Übersicht

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Verlag	:	Wiley-VCH
Buchreihe	:	Advanced Micro and Nanosystems (Bd. 6)
Sprache	:	Englisch
Erschienen	:	12. 12. 2007
Seiten	:	324
Einband	:	Gebunden
Höhe	:	240 mm
Breite	:	170 mm
Gewicht	:	782 g
Dicke	:	21 mm
ISBN	:	9783527314942
Sprache	:	Englisch

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Produktinformation

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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

Deine Buchhandlung

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